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	Study on predicting the deformed membranes based on silicon nitride materials with new deflection functions for calculating the capacitance o (EI收录)
	Suo, Xu Dong[1]; Sun, Wei Jie[1]; Sun, Zheng Dong[2]; Yeow, John T. W.[3]
会议名称	Advanced Materials Research
会议日期	April 13, 2013 - April 14, 2013
会议地点	Guangzhou, China
关键词	Capacitance Capacitive sensors Deflection (structures) Diaphragms Forecasting Information science Materials science Membranes Silicon nitride
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2048963
专题	华南理工大学
作者单位	1.[1] College of Automation Science and Engineering, South China University of Technology, Guangzhou, Guangdong, 510640, China 2.[2] Key Lab. of Systems and Control, Academy of Mathematics and Systems Science, Chinese Academy of Sciences, Beijing, 100191, China 3.[3] Department of Systems Design Engineering, University of Waterloo, Waterloo, N2L 3G1, Canada
推荐引用方式 GB/T 7714	Suo, Xu Dong[1],Sun, Wei Jie[1],Sun, Zheng Dong[2],等. Study on predicting the deformed membranes based on silicon nitride materials with new deflection functions for calculating the capacitance o (EI收录)[C]. 见:Advanced Materials Research. Guangzhou, China. April 13, 2013 - April 14, 2013.

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