| Influence of substrates on the properties of titanium nitride films deposited by DC reaction magnetron sputtering | |
| Gu, Peng; Zhu, Xinghua; Li, Jitao; Wu, Haihua; Sun, Hui; Yang, Dingyu | |
| 刊名 | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
 |
| 2018 | |
| 卷号 | Vol.124 No.8 |
| ISSN号 | 0947-8396 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/1844579 |
| 专题 | 四川大学 |
| 作者单位 | 1.Chengdu Univ Informat Technol, Coll Optoelect Technol, Chengdu 610225, Sichuan, Peoples R China 2.Sichuan Univ Arts & Sci, Coll Intelligent Mfg, Dazhou 635002, Peoples R China |
| 推荐引用方式 GB/T 7714 | Gu, Peng,Zhu, Xinghua,Li, Jitao,et al. Influence of substrates on the properties of titanium nitride films deposited by DC reaction magnetron sputtering[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2018,Vol.124 No.8. |
| APA | Gu, Peng,Zhu, Xinghua,Li, Jitao,Wu, Haihua,Sun, Hui,&Yang, Dingyu.(2018).Influence of substrates on the properties of titanium nitride films deposited by DC reaction magnetron sputtering.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,Vol.124 No.8. |
| MLA | Gu, Peng,et al."Influence of substrates on the properties of titanium nitride films deposited by DC reaction magnetron sputtering".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING Vol.124 No.8(2018). |
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