Highly Sensitive Humidity Sensor Based on Oblique Carbon Nanoplumes

doi:10.3390/s18103407

	Highly Sensitive Humidity Sensor Based on Oblique Carbon Nanoplumes
	Qiao, Siqi 1; Peng, Xiaoyan 1; Wang, Lidan 1; Duan, Shukai 1; Chu, Jin2 ; Jia, Pengfei 1
刊名	SENSORS
	2018-10-01
卷号	18 期号:10 页码:9
关键词	carbon nanomaterial hot filament physical vapor deposition humidity sensor
ISSN号	1424-8220
DOI	10.3390/s18103407
通讯作者	Peng, Xiaoyan(pengxy2015@swu.edu.cn)
英文摘要	In this work, we fabricated three carbon nanoplume structured samples under different temperatures using a simple hot filament physical vapor deposition (HFPVD) process, and investigated the role of surface morphology, defects, and graphitic content on relative humidity (RH) sensing performances. The Van der Drift growth model and oblique angle deposition (OAD) technique of growing a large area of uniformly aligned and inclined oblique arrays of carbon nanoplumes (CNPs) on a catalyst-free silicon substrate was demonstrated. The optimal growing temperature of 800 degrees C was suitable for the formation of nanoplumes with larger surface area, more defect sites, and less graphitic content, compared to the other samples that were prepared. As expected, a low detection limit, high response, capability of reversible behavior, and rapid response/recovery speed with respect to RH variation, was achieved without additional surface modification or chemical functionalization. The holes' depletion has been described as a RH sensing mechanism that leads to the increase of the conduction of the CNPs with increasing RH levels.
资助项目	National Natural Science Foundation of China[61804127] ; Fundamental Research Funds for the Central Universities, China[XDJK2018C024] ; Fundamental Science and Advanced Technology Research Foundation of Chongqing, China[cstc2018jcyjA0870]
WOS研究方向	Chemistry ; Electrochemistry ; Instruments & Instrumentation
语种	英语
出版者	MDPI
WOS记录号	WOS:000448661500235
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/7035]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Peng, Xiaoyan
作者单位	1.Southwest Univ, Coll Elect & Informat Engn, Chongqing Key Lab Nonlinear Circuit & Intelligent, Chongqing 400715, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
推荐引用方式 GB/T 7714	Qiao, Siqi,Peng, Xiaoyan,Wang, Lidan,et al. Highly Sensitive Humidity Sensor Based on Oblique Carbon Nanoplumes[J]. SENSORS,2018,18(10):9.
APA	Qiao, Siqi,Peng, Xiaoyan,Wang, Lidan,Duan, Shukai,Chu, Jin,&Jia, Pengfei.(2018).Highly Sensitive Humidity Sensor Based on Oblique Carbon Nanoplumes.SENSORS,18(10),9.
MLA	Qiao, Siqi,et al."Highly Sensitive Humidity Sensor Based on Oblique Carbon Nanoplumes".SENSORS 18.10(2018):9.