Atomic layer deposition of VO2films with Tetrakis-dimethyl-amino vanadium (IV) as vanadium precursor | |
Lv, Xinrui1,2; Cao, Yunzhen1; Yan, Lu1; Li, Ying1; Song, Lixin1 | |
刊名 | Applied Surface Science |
2017 | |
卷号 | 396页码:214-220 |
ISSN号 | 01694332 |
DOI | 10.1016/j.apsusc.2016.10.044 |
英文摘要 | VO2thin films have been grown on Si(100) (VO2/Si) and fused silica substrates (VO2/SiO2) by atomic layer deposition (ALD) using tetrakis-dimethyl-amino vanadium (IV) (TDMAV) as a novel vanadium precursor and water as reactant gas. The quartz crystal microbalance (QCM) measurement was performed to study the ALD process of VO2thin film deposition, and a constant growth rate of about 0.95 Å/cycle was obtained at the temperature range of 150–200 °C. XRD measurement was performed to study the influence of deposition temperature and post-annealing condition on the crystallization of VO2films, which indicated that the films deposited between 150 and 200 °C showed well crystallinity after annealing at 475 °C for 100 min in Ar atmosphere. XPS measurement verified that the vanadium oxidation state was 4+ for both as-deposited film and post-annealed VO2/Si film. AFM was applied to study the surface morphology of VO2/Si films, which showed a dense polycrystalline film with roughness of about 1 nm. The resistance of VO2/Si films deposited between 150 °C and 200 °C as a function of temperature showed similar semiconductor-to-metal transition (SMT) characters with the transition temperature for heating branch (Tc,h) of about 72 °C, a hysteresis width of about 10 °C and the resistance change of two orders of magnitude. The increase of Tc,hcompared with the bulk VO2(68 °C) may be attributed to the tensile stress along the c-axis in the film. Transmittance measurement of VO2/SiO2films showed typical thermochromic property with a NIR switching efficiency of above 50% at 2 μm across the transition. © 2016 Elsevier B.V. |
内容类型 | 期刊论文 |
源URL | [http://ir.sic.ac.cn/handle/331005/25649] |
专题 | 中国科学院上海硅酸盐研究所 |
作者单位 | 1.Key Laboratory of Inorganic Coating Materials CAS, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai; 201800, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
推荐引用方式 GB/T 7714 | Lv, Xinrui,Cao, Yunzhen,Yan, Lu,et al. Atomic layer deposition of VO2films with Tetrakis-dimethyl-amino vanadium (IV) as vanadium precursor[J]. Applied Surface Science,2017,396:214-220. |
APA | Lv, Xinrui,Cao, Yunzhen,Yan, Lu,Li, Ying,&Song, Lixin.(2017).Atomic layer deposition of VO2films with Tetrakis-dimethyl-amino vanadium (IV) as vanadium precursor.Applied Surface Science,396,214-220. |
MLA | Lv, Xinrui,et al."Atomic layer deposition of VO2films with Tetrakis-dimethyl-amino vanadium (IV) as vanadium precursor".Applied Surface Science 396(2017):214-220. |
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