Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition

doi:10.11868/j.issn.1001-4381.2016.001069

	Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition
	Ma, Liang-Lai 1,2,3; Gao, Le 1,3; Hu, Jian-Bao 1,3; Qiao, Zhen-Jie 1,2,3; Dong, Shao-Ming 1,3
刊名	Cailiao Gongcheng/Journal of Materials Engineering
	2018
卷号	46 期号:4 页码:31-37
ISSN号	10014381
DOI	10.11868/j.issn.1001-4381.2016.001069
英文摘要	Boron nitride interface was deposited on SiC fibers by chemical vapor deposition at different temperatures from BCl3-NH3-H2 mixtures.The effect of temperature on deposition rate,morphology,composition and structure of the interface was studied.The results show that in the low temperature range of 700-900,the deposition rate increases with increasing temperature complying with Arrhenius law,and the apparent active energy calculated is 57.2kJ/mol.The interface is smooth and dense and uniformly deposited on fibers, the deposition rate is controlled by surface reaction.At 900,the deposition rate reaches a maximum(174nm/h),at the same time, surface reaction control is changed to be mass-transportation control. Above 900,the deposition rate decreases with the increasing temperature due to the gas-phase nucleation,and the interface surface becomes loose and rough. BN interface is turbostratic structure with stoichiometric ratio 1:1,and the order degree increases with increasing temperature. © 2018, Journal of Materials Engineering. All right reserved.
出版者	Beijing Institute of Aeronautical Materials (BIAM)
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/25152]
专题	中国科学院上海硅酸盐研究所
作者单位	1.Structural Ceramics and Composites Engineering Research Center, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai; 200050, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China; 3.State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai; 200050, China
推荐引用方式 GB/T 7714	Ma, Liang-Lai,Gao, Le,Hu, Jian-Bao,et al. Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition[J]. Cailiao Gongcheng/Journal of Materials Engineering,2018,46(4):31-37.
APA	Ma, Liang-Lai,Gao, Le,Hu, Jian-Bao,Qiao, Zhen-Jie,&Dong, Shao-Ming.(2018).Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition.Cailiao Gongcheng/Journal of Materials Engineering,46(4),31-37.
MLA	Ma, Liang-Lai,et al."Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition".Cailiao Gongcheng/Journal of Materials Engineering 46.4(2018):31-37.