Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse

doi:10.1007/s00339-018-1634-1

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 瞬态光学技术国家重点实验室

	Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse
	Liu, Xin 1,2,3; Sanner, Nicolas 3; Sentis, Marc 3; Stoian, Razvan 4; Zhao, Wei1 ; Cheng, Guanghua1 ; Uteza, Olivier 3
刊名	APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
	2018-02-01
卷号	124 期号:2
ISSN号	0947-8396
DOI	10.1007/s00339-018-1634-1
产权排序	1
英文摘要	Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of similar to 0.9 mu m core size and similar to 60 mu m depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 mu J) suitable to fabricate non-tapered channels with mean diameter of similar to 1.2 mu m and length of similar to 40 mu m while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.
语种	英语
WOS记录号	WOS:000424515500126
内容类型	期刊论文
源URL	[http://ir.opt.ac.cn/handle/181661/30782]
专题	西安光学精密机械研究所_瞬态光学技术国家重点实验室
作者单位	1.Xian Inst Opt & Precis Mech CAS, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China; 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China; 3.Aix Marseille Univ, CNRS, UMR LP3 7341, F-13288 Marseille, France; 4.Univ Jean Monnet, Univ Lyon, UMR CNRS 5516, Lab Hubert Curien, F-42000 St Etienne, France
推荐引用方式 GB/T 7714	Liu, Xin,Sanner, Nicolas,Sentis, Marc,et al. Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2018,124(2).
APA	Liu, Xin.,Sanner, Nicolas.,Sentis, Marc.,Stoian, Razvan.,Zhao, Wei.,...&Uteza, Olivier.(2018).Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,124(2).
MLA	Liu, Xin,et al."Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 124.2(2018).