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题名	基于强度传输方程的激光损伤应力检测技术研究
作者	雷耀
文献子类	硕士
导师	刘志刚
关键词	相位恢复 Phase retrieval 强度传输方程 TIE 应力双折射 Birefringence 损伤检测 Damage detection
其他题名	A TIE based technique for the measurement of residual stress generated by laser induced damage
英文摘要	在各种高功率激光装置中，光学元件在激光的作用下容易由于各种复杂的物理和化学原因而产生表面损伤。在光学元件的初始损伤形成后，损伤点的尺寸将会在后续的激光作用下呈现线性增长的趋势，导致损伤点周围出现一定大小的应力分布，这种分布会对入射光的强度和波前相位同时产生调制作用，光束质量也因此受到严重影响,甚至会导致在下游光学元件中产生级联的次生损伤。因此及时探测到损伤点的形成并对其损伤严重程度进行评估，对提升激光装置的负载能力具有重大的意义。损伤点的形成过程中，光学元件材料在强激光作用下的出现的熔融现象以及后续的冷却过程中，都会导致损伤点周围一定的范围内形成并残留很强的局部应力，这将引起材料局部范围的折射率和偏振特性的改变，从而出现应力双折射效应(SBR)，对通过该应力双折射引起的相位差进行测量可以准确评估损伤点的严重程度。 现有的传统光学玻璃应力主要就是光弹法和相位测量术。光弹法是测量透明材料应力分布的传统方法。数字全息成像和剪切干涉法等相位测量技术可以用于光学元件的应力定量检测，但其共同的缺点是只能适用于暗场检测光路，因此就无法避免等倾线位置强度为0引起的跃变现象，同时剪切干涉法相位测量成像光路结构复杂，难以满足快速检测的需要。针对现有的光学元件表面损伤应力检测手段的不足，本文围绕强度传输方程(TIE)方法进行了系统研究，将TIE方法应用于损伤应力检测领域，取得了如下具有一定创新性的研究成果： 1) 将TIE方法应用于光学元件表面损伤应力测量，为光学元件的损伤应力情况评估提供了新的方法。且该方法相对于以往的光弹法、剪切相位成像技术等具有光路结构简单，测量结果准确直观并且可量化的优势。 2) 在检测过程中，使用两种不同偏振方向的偏振光进行检测，消除了等倾线处强度为0的值的存在引起的计算结果中的相位跃变问题。使得计算结果呈现圆周对称分布，与实际情况更加吻合。 3) 通过软件的数值模拟和对一系列不同参数下的激光表面损伤样品在显微镜下的实际测量两个方面进行了验证试验，试验结果和理论分析结果能够较好地吻合，验证了方法的准确性和优越性。; In all kinds of high-power laser devices, optical elements are prone to surface damage due to various complex physical and chemical factors under the action of laser. When the initial damage of the optical element is formed, the size of the damage point will show a linear growth trend under the subsequent laser action, which leads to a certain stress distribution around the damage point, which will simultaneously modulate the intensity of the incident light and the wavefront phase, and therefore the beam quality is seriously affected. It may even lead to cascading secondary damage in downstream optical elements. Therefore, it is of great significance to detect the damage point and assess the severity of damage in time to improve the load capacity of the laser device. During the formation of the damage point, the melting phenomenon of the optical element material under the action of strong laser and the subsequent cooling process will lead to the formation and residual strong local stress in a certain range around the damage point, which will cause the change of the refractive index and polarization characteristics in the local range of the material, and thus the stress appears. Birefringence effect (SBR) can accurately assess the severity of damage by measuring the phase difference caused by the stress birefringence. The existing stress of traditional optical glass is mainly photoelastic and phase measuring. Photoelastic method is a traditional method for measuring the stress distribution of transparent materials. The phase measurement techniques such as digital holography and shearing interferometry can be used to detect the stress of optical elements, but the common shortcoming is that it can only be applied to the detection of light path in the dark field. Therefore, it is impossible to avoid the jump phenomenon caused by the position strength of the equal dip line 0, and the structure of the phase measurement imaging of the shearing interferometry is complex and difficult. To meet the needs of rapid detection. In view of the shortcomings of the existing stress detection methods for the surface damage of optical elements, this paper systematically studies the strength transmission equation (TIE) method, and applies the TIE method to the field of damage stress detection, and obtains some innovative research results as follows: 1) The TIE method is applied to the measurement of surface damage stress of optical elements, which provides a new method for evaluating the damage stress of optical elements. Compared with the previous photoelastic method and the shearing phase imaging technology, this method has the advantages of simple optical path structure, and measurement results are intuitive, accurate and quantifiable . 2) In the process of detection, two polarized light with different polarization directions are used to detect the phase jump in the calculation results caused by the existence of the value of the equal dip line of 0. The results show that the calculated results are symmetrical in circumference, which is more consistent with the actual situation. 3) Through the numerical simulation of the software and the two aspects of the laser surface damage samples under the microscope, the experimental results and the theoretical analysis results are in good agreement, and the accuracy and superiority of the method are verified.
学科主题	光学工程
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/31077]
专题	中国科学院上海光学精密机械研究所
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	雷耀. 基于强度传输方程的激光损伤应力检测技术研究[D].

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