Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography
	Deng, Qinyuan 1,2; Yang, Yong 1; Gao, Hongtao 1; Zhou, Yi 1,2; He, Yu 1; Hu, Song 1
刊名	Micromachines
	2017
卷号	8 期号:10 页码:314
关键词	Cost effectiveness - Lithography - Microoptics - Photoresists
ISSN号	2072-666X
英文摘要	A maskless lithography method to realize the rapid and cost-effective fabrication of micro-optics elements with arbitrary surface profiles is reported. A digital micro-mirror device (DMD) is applied to flexibly modulate that the exposure dose according to the surface profile of the structure to be fabricated. Due to the fact that not only the relationship between the grayscale levels of the DMD and the exposure dose on the surface of the photoresist, but also the dependence of the exposure depth on the exposure dose, deviate from a linear relationship arising from the DMD and photoresist, respectively, and cannot be systemically eliminated, complicated fabrication art and large fabrication error will results. A method of compensating the two nonlinear effects is proposed that can be used to accurately design the digital grayscale mask and ensure a precise control of the surface profile of the structure to be fabricated. To testify to the reliability of this approach, several typical array elements with a spherical surface, aspherical surface, and conic surface have been fabricated and tested. The root-mean-square (RMS) between the test and design value of the surface height is about 0.1 μm. The proposed method of compensating the nonlinear effect in maskless lithography can be directly used to control the grayscale levels of the DMD for fabricating the structure with an arbitrary surface profile. © 2017 by the authors.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8841]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Deng, Qinyuan,Yang, Yong,Gao, Hongtao,et al. Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography[J]. Micromachines,2017,8(10):314.
APA	Deng, Qinyuan,Yang, Yong,Gao, Hongtao,Zhou, Yi,He, Yu,&Hu, Song.(2017).Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography.Micromachines,8(10),314.
MLA	Deng, Qinyuan,et al."Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography".Micromachines 8.10(2017):314.