The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering
	Tang, Ping 1,2; Li, Bing 2; Feng, Lianghuan 2
刊名	Ceramics International
	2017
关键词	Aluminum - Electric conductivity - Energy gap - Magnetron sputtering - Sputtering - Substrates - Ultraviolet spectroscopy - X ray diffraction - Zinc oxide
ISSN号	0272-8842
英文摘要	Several ZnO:Al thin films have been successfully deposited on glass substrates at different substrate temperatures by RF (radio frequency) magnetron sputtering method. Effects of the substrate temperatures on the optical and electrical properties of these ZnO:Al thin films were investigated. The UV-VIS-NIR spectra of the ZnO:Al thin films revealed that the average optical transmittances in the visible range are very high, up to 88%. X-ray diffraction results showed that crystallization of these films was improved at higher substrate temperature. The band gaps of ZnO:Al thin films deposited at 25°, 150°, 200°, and 250° are 3.59eV, 3.55eV, 3.53eV, and 3.48eV, respectively. The Hall-effect measurement demonstrated that the electrical resistivity of the films decreased with the increase of the substrate temperature and the electrical resistivity reached 1.990×10-3Ωcm at 250°. © 2017 Elsevier Ltd and Techna Group S.r.l.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8789]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China; 2.College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China
推荐引用方式 GB/T 7714	Tang, Ping,Li, Bing,Feng, Lianghuan. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. Ceramics International,2017.
APA	Tang, Ping,Li, Bing,&Feng, Lianghuan.(2017).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.Ceramics International.
MLA	Tang, Ping,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".Ceramics International (2017).