Analysis of adjustment error in aspheric null testing with CGH

doi:10.1117/12.2243226

	Analysis of adjustment error in aspheric null testing with CGH
	He, Yiwei 1,2; Xi, Hou 1; Chen, Qiang 1; Li, Chaoqiang 1; Zhu, Xiaoqiang 1; Song, Weihong 1
刊名	Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment
	2016
卷号	9684 页码:968444
关键词	Aspherics Electron Holography Errors Holograms Lithography Manufacture Optical Testing Wavefronts
ISSN号	0277-786X
DOI	10.1117/12.2243226
文献子类	C
英文摘要	Generally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: The center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most. © 2016 SPIE.
语种	英语
WOS记录号	WOS:000387429500148
资助机构	Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8531]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100039, China
推荐引用方式 GB/T 7714	He, Yiwei,Xi, Hou,Chen, Qiang,et al. Analysis of adjustment error in aspheric null testing with CGH[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,2016,9684:968444.
APA	He, Yiwei,Xi, Hou,Chen, Qiang,Li, Chaoqiang,Zhu, Xiaoqiang,&Song, Weihong.(2016).Analysis of adjustment error in aspheric null testing with CGH.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment,9684,968444.
MLA	He, Yiwei,et al."Analysis of adjustment error in aspheric null testing with CGH".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment 9684(2016):968444.