Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer

doi:10.1039/c6ra17098f

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer
	Liu, Ling 1; Liu, Kaipeng 1; Zhao, Zeyu 1; Wang, Changtao 1; Gao, Ping 1; Luo, Xiangang 1
刊名	RSC Advances
	2016
卷号	6 期号:98 页码:95973-95978
关键词	Diffraction Electric Field Effects Electric Fields Geometry Masks Plasmons Reflection Silver
ISSN号	2046-2069
DOI	10.1039/c6ra17098f
文献子类	J
英文摘要	In recent years, hyperlens technology has attracted more attention because of its function of magnification and demagnification. In this study, hyperlens demagnification imaging lithography was experimentally demonstrated with sub-diffraction resolution of about 55 nm line width and about 1.8 demagnification factor at 365 nm. The hyperlens was composed of multiple Ag/SiO2films and combined with a resist layer and a plasmonic Ag reflector. It was employed to project mask patterns to subwavelength images for nanolithography. It was found that the plasmonic reflector contributes remarkably to improving imaging contrast, fidelity and efficiency by inhibiting the negative influences from the radial electric field components in the resist region. Furthermore, discussions about imaging influences with geometrical parameters are also presented. © 2016 The Royal Society of Chemistry.
语种	英语
WOS记录号	WOS:000385633100073
资助机构	973 Program of China [2013CBA01700] ; Chinese Nature Science Grant [61138002, 61307013]
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8478]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, P.O. Box 350, Chengdu 2.610209, China
推荐引用方式 GB/T 7714	Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,et al. Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer[J]. RSC Advances,2016,6(98):95973-95978.
APA	Liu, Ling,Liu, Kaipeng,Zhao, Zeyu,Wang, Changtao,Gao, Ping,&Luo, Xiangang.(2016).Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer.RSC Advances,6(98),95973-95978.
MLA	Liu, Ling,et al."Sub-diffraction demagnification imaging lithography by hyperlens with plasmonic reflector layer".RSC Advances 6.98(2016):95973-95978.