Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology

doi:10.1117/12.2237144

	Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology
	Zhong, Xianyun 1; Hou, Xi 1; Yang, Jinshan 1
刊名	Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI
	2016
卷号	9963 页码:99630M
关键词	Cones Finishing Magnetorheological Fluids Nickel Optical Systems Polishing Spacecraft Equipment Telescopes x Ray Optics
ISSN号	0277-786X
DOI	10.1117/12.2237144
文献子类	C
英文摘要	Nickel is the unique material in the X-ray telescopes. And it has the typical soft material characteristics with low hardness high surface damage and low stability of thermal. The traditional fabrication techniques are exposed to lots of problems, including great surface scratches, high sub-surface damage and poor surface roughness and so on. The current fabrication technology for the nickel aspheric mainly adopt the single point diamond turning(SPDT), which has lots of advantages such as high efficiency, ultra-precision surface figure, low sub-surface damage and so on. But the residual surface texture of SPDT will cause great scattering losses and fall far short from the requirement in the X-ray applications. This paper mainly investigates the magnetorheological finishing (MRF) techniques for the super-smooth processing on the nickel optics. Through the study of the MRF polishing techniques, we obtained the ideal super-smooth polishing technique based on the self-controlled MRF-fluid NS-1, and finished the high-precision surface figure lower than RMS 80 (λ=632.8nm) and super-smooth roughness lower than Ra 0.3nm on the plane reflector and roughness lower than Ra 0.4nm on the convex cone. The studying of the MRF techniques makes a great effort to the state-of-the-art nickel material processing level for the X-ray optical systems applications. © 2016 SPIE.
语种	英语
WOS记录号	WOS:000391364700011
资助机构	The Society of Photo-Optical Instrumentation Engineers (SPIE)
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8463]
专题	超精密总体部
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China
推荐引用方式 GB/T 7714	Zhong, Xianyun,Hou, Xi,Yang, Jinshan. Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology[J]. Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI,2016,9963:99630M.
APA	Zhong, Xianyun,Hou, Xi,&Yang, Jinshan.(2016).Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology.Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI,9963,99630M.
MLA	Zhong, Xianyun,et al."Super-smooth processing x-ray telescope application research based on the magnetorheological finishing (MRF) technology".Proceedings of SPIE: Advances in X-Ray;EUV Optics and Components XI 9963(2016):99630M.