KB mirror system of X-ray photo-emission electron microscope beamline
Chen, J.-H.; X.-P. Gong; S. Xue; Q.-P. Lu; Z.-Q. Peng; Y. Song and Y. Wang
刊名Guangxue Jingmi Gongcheng/Optics and Precision Engineering
2017
卷号25期号:11
英文摘要A high accuracy micro-focusing system was designed to improve the light spot focusing quality of the X-ray beam-line for Photo-emission Electron Microscope (PEEM) in Shanghai Synchrotron Radiation Facility(SSRF). The layout of PEEM beam-line of the SSRF was introduced and basic parameters of optics of the micro-focusing system were presented. Two Kirkpatrick-Baez mirrors (KB mirror) were adopted to finish the design of micro-focusing system. The design scheme of a key component-posture adjusting mechanism in the system was introduced. Namely, a three vertical linear driving equipment and a two horizontal linear driving device were combined to implement five-dimensional adjustment of the system. The working principle and process of the posture adjusting mechanism were introduced, and the overall design scheme of micro-focusing system were analyzed deeply. The mechanical performance of KB mirror system was tested, and the testing results of the horizontal adjusting mechanism and the pitch motion of first mirror were given. That the resolution and repeat accuracy of horizontal adjusting mechanism are 0.6 m and 0.85 m respectively, and those of pitch motion are 0.4 and 0.5 respectively, which are better than that of the technical requirements. The other parameters were tested as well, and the results also satisfy the technical requirements. The realization of technical targets of KB mirror system guarantees the high quality focusing of PEEM bean-line. 2017, Science Press. All right reserved.
语种中文
内容类型期刊论文
源URL[http://ir.ciomp.ac.cn/handle/181722/58853]  
专题长春光学精密机械与物理研究所_中科院长春光机所知识产出
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GB/T 7714
Chen, J.-H.,X.-P. Gong,S. Xue,et al. KB mirror system of X-ray photo-emission electron microscope beamline[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(11).
APA Chen, J.-H.,X.-P. Gong,S. Xue,Q.-P. Lu,Z.-Q. Peng,&Y. Song and Y. Wang.(2017).KB mirror system of X-ray photo-emission electron microscope beamline.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(11).
MLA Chen, J.-H.,et al."KB mirror system of X-ray photo-emission electron microscope beamline".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.11(2017).
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