releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning

	releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning
	Cao Zheng-Cai ; Zhao Hui-Dan ; Wang Yong-Ji
刊名	Tien Tzu Hsueh Pao/Acta Electronica Sinica
	2011
卷号	39 期号:7 页码:1545-1550
关键词	Fabrication Fuzzy systems Optimization Petri nets
ISSN号	3722112
英文摘要	Because of large amount of stochastic and uncertain factors in semiconductor wafer fabrication (SWF), we often meet with all kinds of disruptions which make the former optimal scheduling scheme lose superiority. Considering the advantage of the fuzzy Petri-net (FPN) on the knowledge expression and logical reasoning, a releasing control policy for SWF based on FPN is proposed. According to the releasing FPN -reasoning model and the real-time data collected from the line, the control method can help to take the feasible releasing action to adopted to different conditions. With the releasing strategy, the throughput of the wafer fabrication can be maximized and the system can be optimized to a large extent. Finally, the effectiveness of this proposed method is confirmed by simulation.
收录类别	EI
语种	中文
公开日期	2011-10-10
内容类型	期刊论文
源URL	[http://124.16.136.157/handle/311060/13889]
专题	软件研究所_互联网软件技术实验室 _期刊论文
推荐引用方式 GB/T 7714	Cao Zheng-Cai,Zhao Hui-Dan,Wang Yong-Ji. releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning[J]. Tien Tzu Hsueh Pao/Acta Electronica Sinica,2011,39(7):1545-1550.
APA	Cao Zheng-Cai,Zhao Hui-Dan,&Wang Yong-Ji.(2011).releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning.Tien Tzu Hsueh Pao/Acta Electronica Sinica,39(7),1545-1550.
MLA	Cao Zheng-Cai,et al."releasing control policy for semiconductor wafer fabrication based on fuzzy petri nets-reasoning".Tien Tzu Hsueh Pao/Acta Electronica Sinica 39.7(2011):1545-1550.