ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication

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	ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication
	Cao Zhengcai ; Zhao Huidan ; Wang Yongji
刊名	CHINESE JOURNAL OF ELECTRONICS
	2013
卷号	22 期号:1 页码:25-30
关键词	Semiconductor manufacturing system Scheduling Adaptive neuro-fuzzy inference system Simulated annealing algorithm
ISSN号	1022-4653
中文摘要	In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance.
英文摘要	In this paper, an optimized mechanism for Semiconductor wafer fabrication (SWF) by integrating the Adaptive neuro-fuzzy inference system (ANFIS) with Simulated annealing (SA) algorithm is proposed. In this approach, aiming to solve the rush order problem which significantly affect the cycle time and impact the Work in process (WIP) of lots due to the high priority, we build an ANFIS based prediction model which will be embedded into releasing to forecast product codes and quantities of the contingent rush orders. Then a scheduler based on SA algorithm is constructed, the coding of which represents a combination of scheduling policies, including lot releasing policies, dispatching rules, batching rules and setting-up rules. When the SA finished its optimization process, an optimal scheduling policy is produced. By using the proposed approach, we will find that the system can be optimized to a large extent and give a better performance.
收录类别	SCI
语种	英语
WOS记录号	WOS:000317701800005
公开日期	2014-12-16
内容类型	期刊论文
源URL	[http://ir.iscas.ac.cn/handle/311060/16957]
专题	软件研究所_软件所图书馆_期刊论文
推荐引用方式 GB/T 7714	Cao Zhengcai,Zhao Huidan,Wang Yongji. ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication[J]. CHINESE JOURNAL OF ELECTRONICS,2013,22(1):25-30.
APA	Cao Zhengcai,Zhao Huidan,&Wang Yongji.(2013).ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication.CHINESE JOURNAL OF ELECTRONICS,22(1),25-30.
MLA	Cao Zhengcai,et al."ANFIS and SA Based Approach to Prediction, Scheduling, and Performance Evaluation for Semiconductor Wafer Fabrication".CHINESE JOURNAL OF ELECTRONICS 22.1(2013):25-30.