Snapshot multi-wavelength interference microscope

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	Snapshot multi-wavelength interference microscope
	Pau, Stanley 3; Spires, Oliver 3; Zhang JC(张俊超)2; Tu, Xingzhou 3; Tian, Xiaobo 3; Liang, Rongguang 3; Brock, Neal 1; Rong SB(荣胜波); Huang YZ(黄益泽); Zhang HY(张环宇)
刊名	Optics Express
	2018
卷号	26 期号:14 页码:18279-18291
ISSN号	1094-4087
通讯作者	Liang, Rongguang
产权排序	2
中文摘要	A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000438209100056
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/22210]
专题	沈阳自动化研究所_数字工厂研究室
作者单位	1.4D Technology Corporation, Tucson AZ 85706, United States 2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 3.College of Optics Science, University of Arizona, Tucson, AZ 85721, United States
推荐引用方式 GB/T 7714	Pau, Stanley,Spires, Oliver,Zhang JC,et al. Snapshot multi-wavelength interference microscope[J]. Optics Express,2018,26(14):18279-18291.
APA	Pau, Stanley.,Spires, Oliver.,Zhang JC.,Tu, Xingzhou.,Tian, Xiaobo.,...&朱军.(2018).Snapshot multi-wavelength interference microscope.Optics Express,26(14),18279-18291.
MLA	Pau, Stanley,et al."Snapshot multi-wavelength interference microscope".Optics Express 26.14(2018):18279-18291.