Submicron processing using laser-induced photonic nanojet

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	Submicron processing using laser-induced photonic nanojet
	Yu HB(于海波); Wen YD(文扬东); Wang FF(王飞飞); LI WJ(李文荣); Liu LQ(刘连庆)
	2017
会议名称	17th IEEE International Conference on Nanotechnology, NANO 2017
会议日期	July 25-28, 2017
会议地点	Pittsburgh, PA, United states
页码	940-941
通讯作者	Liu LQ(刘连庆) ; Li WJ(李文荣)
中文摘要	In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议主办者	IEEE Nanotechnology Council (NTC)
会议录	2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
会议录出版者	IEEE
会议录出版地	New York
语种	英语
ISBN号	978-1-5090-3028-6
WOS记录号	WOS:000434647500219
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/21545]
专题	沈阳自动化研究所_机器人学研究室
作者单位	1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 2.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong, Hong Kong 3.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式 GB/T 7714	Yu HB,Wen YD,Wang FF,et al. Submicron processing using laser-induced photonic nanojet[C]. 见:17th IEEE International Conference on Nanotechnology, NANO 2017. Pittsburgh, PA, United states. July 25-28, 2017.