Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization

doi:10.1155/2017/3982503

CORC > 自动化研究所 > 中国科学院自动化研究所 > 复杂系统管理与控制国家重点实验室 > 先进机器人控制团队

	Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
	Zhou, Chao1 ; Deng, Lu 2; Cheng, Long1 ; Cao, Zhiqiang1 ; Wang, Shuo1 ; Tan, Min1
刊名	SCANNING
	2017
期号	2017 页码:8
关键词	Multiwalled Carbon Nanotubes Nanostructures Nanorobotic Manipulation System Electron-microscope
DOI	10.1155/2017/3982503
文献子类	Article
英文摘要	In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.
WOS关键词	MULTIWALLED CARBON NANOTUBES ; NANOROBOTIC MANIPULATION ; ELECTRON-MICROSCOPE ; NANOSTRUCTURES ; SYSTEM
WOS研究方向	Instruments & Instrumentation ; Microscopy
语种	英语
WOS记录号	WOS:000404856100001
资助机构	National Natural Science Foundation of China(61528304 ; Beijing Natural Science Foundation(4152054) ; 71401189 ; 61473295)
内容类型	期刊论文
源URL	[http://ir.ia.ac.cn/handle/173211/15254]
专题	自动化研究所_复杂系统管理与控制国家重点实验室_先进机器人控制团队
作者单位	1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing, Peoples R China 2.Cent Univ Finance & Econ, Sch Stat & Math, Beijing, Peoples R China
推荐引用方式 GB/T 7714	Zhou, Chao,Deng, Lu,Cheng, Long,et al. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization[J]. SCANNING,2017(2017):8.
APA	Zhou, Chao,Deng, Lu,Cheng, Long,Cao, Zhiqiang,Wang, Shuo,&Tan, Min.(2017).Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.SCANNING(2017),8.
MLA	Zhou, Chao,et al."Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization".SCANNING .2017(2017):8.