Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor

doi:10.1109/JMEMS.2017.2786730

	Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor
	Chan, Elena 1; Lin, Dequan 2,3; Lu, Lei 1,4; Zhang, Deqiang 5; Guo, Shichao 2; Zhang, Yiming 2; Chau, Kevin 1,2; Wong, Man 1
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2018-04-01
卷号	27 期号:2 页码:231-238
关键词	Pressure sensor piezoresistive MEMS silicon bulk eutectic bonding
ISSN号	1057-7157
DOI	10.1109/JMEMS.2017.2786730
文献子类	Article
英文摘要	Distinct from conventional diaphragm-type pressure sensors, a silicon-based bulk-type high pressure sensor has been analyzed, realized, and characterized. External hydrostatic pressure acting on the sensor is converted to a biaxial compression inside an all-silicon encapsulated vacuum cavity. The stress anisotropy is analytically modeled and numerically simulated. The biaxial compression is measured using two pairs of piezoresistors oriented to optimally utilize the anisotropy of silicon piezoresistance. An improved pressure seal in the test-package allowed extended testing of the sensor up to a pressure of 200 MPa and a temperature of 175 degrees C. Reported also is a zero-offset of the sensor, largely attributed to the tensile stress induced by the insulating cover oxide after cooling from the high-temperature dopant activation anneal.
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
语种	英语
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号	WOS:000428934000012
资助机构	Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200)
内容类型	期刊论文
源URL	[http://ir.iggcas.ac.cn/handle/132A11/83142]
专题	中国科学院地质与地球物理研究所
通讯作者	Chan, Elena; Wong, Man
作者单位	1.Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China 2.Chinese Acad Sci, Inst Geol & Geophys, Key Lab Petr Resource Res, Beijing, Peoples R China 3.Univ Chinese Acad Sci, Beijing, Peoples R China 4.HKUST Jockey Club Inst Adv Study, Hong Kong, Hong Kong, Peoples R China 5.Beijing Sllaid Sci & Technol Co Ltd, Beijing, Peoples R China
推荐引用方式 GB/T 7714	Chan, Elena,Lin, Dequan,Lu, Lei,et al. Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2018,27(2):231-238.
APA	Chan, Elena.,Lin, Dequan.,Lu, Lei.,Zhang, Deqiang.,Guo, Shichao.,...&Wong, Man.(2018).Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,27(2),231-238.
MLA	Chan, Elena,et al."Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 27.2(2018):231-238.