Synthesis of Si/SiO2 core-shell nanowire arrays and broadband anti-reflection effects in diluted Si nanowire arrays by adjusting dielectric shell thickness

doi:10.1088/1361-6528/aa66b4

CORC > 合肥物质科学研究院 > 中国科学院合肥物质科学研究院 > 中科院固体物理研究所

	Synthesis of Si/SiO2 core-shell nanowire arrays and broadband anti-reflection effects in diluted Si nanowire arrays by adjusting dielectric shell thickness
	Li, Xinhua 1; Chen, Tao 1; Zhou, BuKang 1; Liu, Guangqiang 1; Shi, Tongfei 1; Wen, Long 2,3; Cao, Huaxiang 1; Wang, Yuqi 1
刊名	NANOTECHNOLOGY
	2017-05-05
卷号	28 期号:18
关键词	Nanowire Nanosphere Lithography (Nsl) Finite-difference Time-domain (Fdtd)
DOI	10.1088/1361-6528/aa66b4
文献子类	Article
英文摘要	A low filling ratio and enhanced absorption is needed to enable the full potential of Si nanowire (NW) arrays for optoelectronic applications. In this paper, we report a versatile, scalable fabrication technique that uses nanosphere lithography (NSL) patterning for the synthesis of vertically aligned Si and Si/SiO2 NW arrays. The optical reflection of the NW arrays can be substantially suppressed by the addition of the transparent shell. Meanwhile, by the finite-difference time-domain (FDTD) simulation, we find that the absorption enhancement in the core Si NW can be obtained by adding the transparent shell. The special absorption enhancement of the Si NW arrays with a core-shell structure can be theoretically understood by modal analysis. The absorption in such Si NW array structures is very sensitive to the thickness of transparent coating. By the addition of a SiO2 shell layer, the absorption in the inner Si NW array can be substantially enhanced. Furthermore, significant absorption enhancement and broadband antireflection effects can be achieved by the diluted Si NWs combined with the single dielectric shell.
WOS关键词	2-DIMENSIONAL THERMAL-OXIDATION ; SOLAR-CELLS ; ENHANCED ABSORPTION ; SILICON
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
WOS记录号	WOS:000399143600002
资助机构	National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; Joint Funds of the National Natural Science Foundation of China(U1632123) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; 51671182)
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/33344]
专题	合肥物质科学研究院_中科院固体物理研究所
作者单位	1.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China 2.Chinese Acad Sci, Key Lab Nanodevices & Applicat CAS, Suzhou 215123, Peoples R China 3.Chinese Acad Sci, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China
推荐引用方式 GB/T 7714	Li, Xinhua,Chen, Tao,Zhou, BuKang,et al. Synthesis of Si/SiO2 core-shell nanowire arrays and broadband anti-reflection effects in diluted Si nanowire arrays by adjusting dielectric shell thickness[J]. NANOTECHNOLOGY,2017,28(18).
APA	Li, Xinhua.,Chen, Tao.,Zhou, BuKang.,Liu, Guangqiang.,Shi, Tongfei.,...&Wang, Yuqi.(2017).Synthesis of Si/SiO2 core-shell nanowire arrays and broadband anti-reflection effects in diluted Si nanowire arrays by adjusting dielectric shell thickness.NANOTECHNOLOGY,28(18).
MLA	Li, Xinhua,et al."Synthesis of Si/SiO2 core-shell nanowire arrays and broadband anti-reflection effects in diluted Si nanowire arrays by adjusting dielectric shell thickness".NANOTECHNOLOGY 28.18(2017).