Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform

doi:10.1007/s00542-016-3091-0

CORC > 合肥物质科学研究院 > 中国科学院合肥物质科学研究院 > 中科院固体物理研究所

	Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform
	Guo, Lianfeng 1,2; Xu, Lei 4; Xu, Zongke 3; Duan, Guotao 3; Wang, Yi 1; Zhou, Hong 1; Liu, Yanxiang 1; Cai, Weiping 3; Wang, Yuelin 1; Li, Tie 1
刊名	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
	2017-07-01
卷号	23 期号:7 页码:2699-2705
DOI	10.1007/s00542-016-3091-0
文献子类	Article
英文摘要	Micro-nano fusion gas sensors integrating two-beam micro-hotplatform with nanostructured porous film were fabricated in this study. The micro-hotplatform (MHP) was manufactured using standard micro-electro-mechanical systems technology in wafer runs. Based on a colloidal crystal template method, highly ordered porous tin dioxide films were in situ grown on the MHP. The as-fabricated sensors achieved the highest response at 250 A degrees C with power consumption only 24 mW. Due to the low thermal capacity and ordered porous thin films of the sensor, the response time was about 2 s. The sensors are sensitive to ethanol in a large range from 0.1 to 250 ppm. The developed sensor here with high performance is an excellent candidate which can be incorporated into portable devices for alcohol detection such as breath analyzers.
WOS关键词	TIN OXIDE ; PERFORMANCE ; ETHANOL ; CO
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
WOS记录号	WOS:000404149800037
资助机构	National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300)
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/31974]
专题	合肥物质科学研究院_中科院固体物理研究所
作者单位	1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Anhui Key Lab Nanomat & Nanotechnol, Hefei 230031, Anhui, Peoples R China 4.East China Res Inst Elect Engn, Hefei 230088, Anhui, Peoples R China
推荐引用方式 GB/T 7714	Guo, Lianfeng,Xu, Lei,Xu, Zongke,et al. Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(7):2699-2705.
APA	Guo, Lianfeng.,Xu, Lei.,Xu, Zongke.,Duan, Guotao.,Wang, Yi.,...&Li, Tie.(2017).Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,23(7),2699-2705.
MLA	Guo, Lianfeng,et al."Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23.7(2017):2699-2705.