Evolution of interface chemistry and dielectric properties of HfO2/Ge gate stack modulated by Gd incorporation and thermal annealing | |
He, Gang1; Zhang, Jiwen1; Sun, Zhaoqi1; Lv, Jianguo2; Chen, Hanshuang1; Liu, Mao3 | |
刊名 | AIP ADVANCES
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2016-02-01 | |
卷号 | 6期号:2页码:1-7 |
DOI | 10.1063/1.4941698 |
文献子类 | Article |
英文摘要 | In current work, effects of rapid thermal annealing (RTA) on the interface chemistry and electrical properties of Gd-doped HfO2 (HGO)/Ge stack have been investigated systematically. It has been demonstrated that the presence of GeOx interfacial layer between HfGdO and Ge is unavoidable and appropriate annealing can improve metal-oxide-semiconductor device characteristics such as interface state density, accumulation capacitance, frequency dispersion, and leakage current. The involved leakage current conduction mechanisms for metal-oxide-semiconductor (MOS) capacitors based on sputtered HGO/Ge gate stacks with optimal annealed temperature also have been discussed in detail. As a result, the Al/HGO barrier height and the band offset of HGO/Ge gate stack have been determined precisely. (C) 2016 Author(s). |
WOS关键词 | ELECTRICAL-PROPERTIES ; MOS CAPACITORS ; THIN-FILMS ; DEPOSITION ; TEMPERATURE ; OXIDATION ; QUALITY ; PLASMA ; LAYER |
WOS研究方向 | Science & Technology - Other Topics ; Materials Science ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000371739000003 |
资助机构 | National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Key Project of Fundamental Research(2013CB632705) ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; National Natural Science Foundation of China(51572002 ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Anhui Provincial Natural Science Foundation(1608085MA06) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Technology Foundation for Selected Overseas Chinese Scholar, Ministry of Personnel of China(J05015131) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Outstanding Young Scientific Foundation and Youth Science Research Foundation of Anhui University(KJJQ1103) ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; Anhui University ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) ; 11474284) |
内容类型 | 期刊论文 |
源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/22069] ![]() |
专题 | 合肥物质科学研究院_中科院固体物理研究所 |
作者单位 | 1.Anhui Univ, Radiat Detect Mat & Devices Lab, Sch Phys & Mat Sci, Hefei 230601, Peoples R China 2.Hefei Normal Univ, Dept Phys & Elect Engn, Hefei 230061, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Anhui Key Lab Nanomat & Nanostruct, Key Lab Mat Phys, Hefei 230031, Peoples R China |
推荐引用方式 GB/T 7714 | He, Gang,Zhang, Jiwen,Sun, Zhaoqi,et al. Evolution of interface chemistry and dielectric properties of HfO2/Ge gate stack modulated by Gd incorporation and thermal annealing[J]. AIP ADVANCES,2016,6(2):1-7. |
APA | He, Gang,Zhang, Jiwen,Sun, Zhaoqi,Lv, Jianguo,Chen, Hanshuang,&Liu, Mao.(2016).Evolution of interface chemistry and dielectric properties of HfO2/Ge gate stack modulated by Gd incorporation and thermal annealing.AIP ADVANCES,6(2),1-7. |
MLA | He, Gang,et al."Evolution of interface chemistry and dielectric properties of HfO2/Ge gate stack modulated by Gd incorporation and thermal annealing".AIP ADVANCES 6.2(2016):1-7. |
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