Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation
	Chen, Junming; Wang, Leilei; Kong, Fanyu; Xia, Zhilin; Jin, Yunxia; Huang, Haopeng; Li, Linxin; Cui, Yun; Shao, Jianda
刊名	Appl. Optics
	2017
卷号	56 期号:11 页码:3087
通讯作者	yxjin@siom.ac.cn
英文摘要	In this study, two kinds of Au-coated gratings (ACGs) with a period of 1740 lines/mm were fabricated and evaluated. For these ACG samples, magnetron sputtering and e-beam evaporation were used as the gold deposition process, and the samples had a bandwidth of at least 170 nm, with the -1st-order diffraction efficiency exceeding 90% around the center wavelength of 800 nm. The one-on-one damage threshold of ACGs fabricated by magnetron sputtering and e-beam evaporation measured at a pulse width of 60 fs was 0.59 J/cm(2) and 0.43 J/cm(2) in the case of the beam normal fluence, respectively. The typical damage morphology of the former type of samples was melting of the gold film, whereas those of the latter type were blisters and peeling off of the gold film. In theory, the electromagnetic field, temperature field, and thermal stress field distribution in the ACGs were calculated using the finite element method. We demonstrated that the adhesion between the gold film and the photoresist played an important role in determining the damage behavior. Thus, the laser resistance of ACG can be improved by enhancing the adhesion between the gold film and the photoresist, and magnetron sputtering was an alternative method to obtain ACGs with much better adhesion. (C) 2017 Optical Society of America
收录类别	SCI
资助信息	National Natural Science Foundation of China (NSFC) [10704079, U1430121]; Shanghai Science and Technology Committee Program [16JC1420600]
WOS记录号	WOS:000399326300036
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28071]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Chen, Junming,Wang, Leilei,Kong, Fanyu,et al. Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation[J]. Appl. Optics,2017,56(11):3087.
APA	Chen, Junming.,Wang, Leilei.,Kong, Fanyu.,Xia, Zhilin.,Jin, Yunxia.,...&Shao, Jianda.(2017).Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation.Appl. Optics,56(11),3087.
MLA	Chen, Junming,et al."Evaluation of femtosecond laser damage to gold pulse compression gratings fabricated by magnetron sputtering and e-beam evaporation".Appl. Optics 56.11(2017):3087.