Imaging ellipsometer with large field of view

	Imaging ellipsometer with large field of view
	Huang, Huijie; Hu, Shiyu; Yuan, Qiao; Gu, Liyuan; Cheng, Weilin; Zhang, Shanhua; Zeng, Aijun; Hu, Guohang; He, Hongbo
	2016
通讯作者	aijunzeng@siom.ac.cn
英文摘要	A polarizer-compensator- sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified.
会议录	OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV
语种	英语
ISSN号	0277-786X
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/27351]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
推荐引用方式 GB/T 7714	Huang, Huijie,Hu, Shiyu,Yuan, Qiao,et al. Imaging ellipsometer with large field of view[C]. 见:.