Investigation of ITO thin film deposited on organic films by RF magnetron sputter

	Investigation of ITO thin film deposited on organic films by RF magnetron sputter
	Sun, Shuo; Zhang, Gui-Ling; Zhang, Fu-Jia
	2007
会议名称	International Nano-Optoelectronic Workshop, iNOW
会议日期	July 29, 2007 - August 11, 2007
会议地点	Beijing and Lanzhou, China
关键词	Sputtering Chemical vapor deposition Magnetrons Molecular beam epitaxy Thick films Thin film devices Thin films International (CO) ITO thin films Organic films Organic substrates RF magnetrons Substrate temperature (ST)
页码	282-283
通讯作者	Sun, S. (sunsh03@lzu.cn)
会议录	2007 International Nano-Optelectronics Workshop, iNOW
会议录出版地	Piscataway
学科主题	Metal Plating;Electron Tubes;Chemical Reactions;Atomic and Molecular Physics
语种	英语
内容类型	会议论文
源URL	[http://ir.lzu.edu.cn/handle/262010/184800]
专题	物理科学与技术学院_会议论文
推荐引用方式 GB/T 7714	Sun, Shuo,Zhang, Gui-Ling,Zhang, Fu-Jia. Investigation of ITO thin film deposited on organic films by RF magnetron sputter[C]. 见:International Nano-Optoelectronic Workshop, iNOW. Beijing and Lanzhou, China. July 29, 2007 - August 11, 2007.