Investigation on the DLC films prepared by dual-ion beam sputtering deposition

	Investigation on the DLC films prepared by dual-ion beam sputtering deposition
	Wang, Tianmin; Wang, WeiJie; Liu, Guiang; Huang, Liangpu; Luo, Chuntai; Lui, Dingquan; Xu, Ming; Yang, Yimin
	1991
会议名称	1991 International Conference on Thin Film Physics and Applications
会议日期	April 15, 1991 - April 17, 1991
会议地点	Shanghai, China
关键词	Carbon Diamonds Synthetic Films Preparation Ion Beams Effects Sputtering Diamond Like Carbon Dual Ion Beam Sputtering
卷号	42
期号	16
页码	1058
通讯作者	Wang, Tianmin
会议录	Vacuum
会议录出版地	OXFORD
学科主题	Chemical Products Generally; Nuclear Physics; Plasma Physics
语种	英语
ISSN号	0042-207X
内容类型	会议论文
源URL	[http://ir.lzu.edu.cn/handle/262010/184781]
专题	物理科学与技术学院_会议论文
推荐引用方式 GB/T 7714	Wang, Tianmin,Wang, WeiJie,Liu, Guiang,et al. Investigation on the DLC films prepared by dual-ion beam sputtering deposition[C]. 见:1991 International Conference on Thin Film Physics and Applications. Shanghai, China. April 15, 1991 - April 17, 1991.