Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition

	Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition
	Zhang, Wenli; Chen, Guanghua; He, Bin; Zhu, Xiuhong; Ma, Zhanjie; Ding, Yi; Liu, Guohan; Gao, Zhihua; Song, Xuemei
刊名	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
	2006-09
卷号	26 期号:SUPPL.页码:67-70
关键词	a-Si:H films Bonding mode Hot filament assistance
ISSN号	16727126
通讯作者	Zhang, W.
学科主题	Solar Cells;Inorganic Compounds;Coating Techniques;
语种	中文
内容类型	期刊论文
源URL	[http://ir.lzu.edu.cn/handle/262010/178068]
专题	物理科学与技术学院_期刊论文
推荐引用方式 GB/T 7714	Zhang, Wenli,Chen, Guanghua,He, Bin,et al. Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2006,26(SUPPL.):67-70.
APA	Zhang, Wenli.,Chen, Guanghua.,He, Bin.,Zhu, Xiuhong.,Ma, Zhanjie.,...&Song, Xuemei.(2006).Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,26(SUPPL.),67-70.
MLA	Zhang, Wenli,et al."Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 26.SUPPL.(2006):67-70.