Parametric and non-parametric model kinematic calibration of photoelectric detecting system

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Parametric and non-parametric model kinematic calibration of photoelectric detecting system
	Luo, A.; H. Sun; H. Jia and M. Zhao
刊名	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
	2016
卷号	45 期号:5
英文摘要	An interference method to remove all mosaic grating errors using a phase-difference reference window without compensation for coupled mosaic errors or analyzing the far-field diffraction intensity patterns is proposed. The reference window is achieved by adding a small-aperture prism; therefore, the incident light on the mosaic gratings contains two different angles of incidence and optical paths, eliminating the uncertainty of longitudinal mosaic error in the interferometer. The mathematical model of the method is established and optical arrangement is presented. Interference fringes with the reference window and alignment process are simulated and the accuracy of mosaic errors are analyzed. The experimental and simulation results show that our method can eliminate longitudinal mosaic error and all other mosaic grating errors. The accuracy of angle mosaic errors can be less than 1 mu rad and position mosaic errors can be to the nanometer level. Compared with the far-field diffraction intensity patterns method, our method reduces the complexity of the optical structure and ensures measurement accuracy. (C) 2016 Optical Society of America
收录类别	EI
语种	中文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/57123]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Luo, A.,H. Sun,H. Jia and M. Zhao. Parametric and non-parametric model kinematic calibration of photoelectric detecting system[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2016,45(5).
APA	Luo, A.,H. Sun,&H. Jia and M. Zhao.(2016).Parametric and non-parametric model kinematic calibration of photoelectric detecting system.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,45(5).
MLA	Luo, A.,et al."Parametric and non-parametric model kinematic calibration of photoelectric detecting system".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 45.5(2016).