Structure design of nanometer positioning stage with a large stroke

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Structure design of nanometer positioning stage with a large stroke
	Chen, Q.
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2016
卷号	24 期号:5
英文摘要	As the performance of a scanning interference field lithographic system using static three-step splicing exposure method is related to the positioning accuracy and stability, this paper designs a 2D positioning stage with a large stroke to achieve high positioning accuracy. The friction drive and piezoelectric ceramic micro displacement mechanism were combined to form a macro-micro feed mechanism. A closed gas hydrostatic guideway was used to drive the stage to implement the raster indexing and scanning movement along X, Y directions. The friction driving mechanism and aerostatic bearing structure were optimally designed in detail, and the natural frequency of overall structure of the stage was calculated by finite element analysis. An autocollimator was used to test the linearity of the guideways in X, Y directions, and results show that yaw and pitch accuracy in both directions are within 0.04 m. A laser interferometer was taken to detect the positioning accuracy and positioning noise of the guideway in X direction and the result shows that for the stage with a stroke of 220 mm in X direction and 300 mm in Y direction, the positioning accuracy of X direction is better than 5 nm, and the positional stability is better than 25 nm, meeting the requirements of scanning interference field exposure system stage for nanometer positioning precision. 2016, Science Press. All right reserved.
收录类别	EI
语种	中文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/56866]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen, Q.. Structure design of nanometer positioning stage with a large stroke[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(5).
APA	Chen, Q..(2016).Structure design of nanometer positioning stage with a large stroke.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(5).
MLA	Chen, Q.."Structure design of nanometer positioning stage with a large stroke".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.5(2016).