NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS

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	NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS
	Du, X. M. ; Zheng, K. F. ; Wang, Y. ; Li, X. X. ; Wang, M. P. ; Zhang, G. ; Wu, E. D.
刊名	DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
	2017
卷号	12 期号:2 页码:265-272
关键词	Hard multilayer neutron and X-ray reflectometry interfacial structures
ISSN号	1842-3582
通讯作者	Du, XM (reprint author), Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Peoples R China.
中文摘要	Neutron and X-ray reflectometry are two non destructive techniques which provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured thin films and superlattices. In the present work nanostructured multilayers of CrAlN/TiN with different repeated bilayer thickness were fabricated by reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interfacial structures of multilayers. The real space information, such as scattering length density (SLD), film thickness and interfical roughness, are extracted by fitting neutron and X-ray reflectivity data to a model for the structure of the multilayer samples in reflectometry experiments. The results show that the SLD and individual thickness in the repeated bilayers are closer to the nominal values of multilayers for neutron reflectometry than X-ray reflectometry. The interface roughness however is smaller for X-ray reflectometry than neutron reflectometry. X-ray reflectometry is thus complementary to neutron reflectometry which provide a different contrast between the elements than X-rays.
学科主题	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
收录类别	SCI
资助信息	NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) [2014BB05]; Research Foundation of Education Bureau of Liaoning Province, China [LG201620]
语种	英语
公开日期	2017-08-17
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/77921]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	Du, X. M.,Zheng, K. F.,Wang, Y.,et al. NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS[J]. DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,2017,12(2):265-272.
APA	Du, X. M..,Zheng, K. F..,Wang, Y..,Li, X. X..,Wang, M. P..,...&Wu, E. D..(2017).NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS.DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES,12(2),265-272.
MLA	Du, X. M.,et al."NEUTRON AND X-RAY REFLECTOMETRY FOR THE INVESTIGATION OF NANO-SCALE HARD MULTILAYERS".DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES 12.2(2017):265-272.