Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure | |
Wang WQ(王伟奇)1,2; Ji L(吉利)1; Li HX(李红轩)1; Zhao, Yiman1; Zhou HD(周惠娣)1; Chen JM(陈建敏)1 | |
刊名 | AIP Advances |
2017 | |
卷号 | 7期号:4页码:045108(1-7) |
ISSN号 | 2158-3226 |
通讯作者 | 吉利 ; 李红轩 |
英文摘要 | Here, we report a facile synthesis method for the fabrication of various nanoperiod multilayers in carbon-copper films only by conveniently changing the deposition pressure from the reactive magnetron sputter process. To obtain the nano-multilayered structure with different number of layers, only one single sputtering target of copper is used at gas pressure varied from 0.4 Pa to 1.2 Pa by flowing gas mixture of argon and methane, while 600W DC input power is applied to a copper target. The influence of deposition pressure on the microstructure and constitution of the films are investigated by X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FESEM) and high-resolution transmission electron microscopy (HRTEM). The results show that carbon-rich layers and copper-rich layers are alternately arranged to self-organize the multilayered structure in the carbon-copper films, both of the carbon-rich layer and copper-rich layer constitute a period. The amount of layers in the multilayered structure is found to decrease with the deposition pressure, the film deposited with 0.4 Pa has the maximum layers and the highest copper content compared with the other deposition pressure. Effects of the growth condition on the growth rate, the number of the layers and the energy of plasmas during deposition process are discussed. Based on the (a) influence of the effect of carbon absorbed on the copper target leading to target poisoning, (b) influence of deposition pressure on the energy of etching ions and (c) the energetic ions bombardment enhanced inter diffusion of deposition ions, the mechanism of self-organized formation of nano-multilayer in the carbon-copper films with various number of layer is proposed. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National 973 program of China (No. 2013CB632302);the National Natural Science Foundation of China (Grant No. 51472250, No. 51405474;No. U1637204);the program of the Light of the Chinese Academy of Science in china’s Western Region (2015);the Chinese Academy of Science and its Youth Innovation Promotion Association(2016368) |
语种 | 英语 |
WOS记录号 | WOS:000400396100029 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/22184] |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100081, Peoples R China |
推荐引用方式 GB/T 7714 | Wang WQ,Ji L,Li HX,et al. Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure[J]. AIP Advances,2017,7(4):045108(1-7). |
APA | Wang WQ,Ji L,Li HX,Zhao, Yiman,Zhou HD,&Chen JM.(2017).Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure.AIP Advances,7(4),045108(1-7). |
MLA | Wang WQ,et al."Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure".AIP Advances 7.4(2017):045108(1-7). |
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