| 微机械圆盘谐振器的结构分析; Structural Analysis of Disk Micromechanical Resonator | |
| 郭建来 ; 刘畅 ; 王建艳 ; 林杰 ; 郭航 | |
| 2013-07-28 | |
| 关键词 | 微机械圆盘谐振器 集总参数模型 有限元 锚点 品质因子 高阶谐振模式 disk micromechanical resonator lumped parameter model FEM anchor quality factor higher order vibration mode |
| 英文摘要 | 运用AnSyS对圆盘谐振器的结构进行有限元分析,并结合集总参数模型,确定了圆盘谐振器锚点尺寸与位置对圆盘谐振器性能的影响,包括谐振频率,振幅与品质因子(Q).在此基础上,提出了一种在圆盘谐振器高阶模式的节点环处做锚点的方案,不仅可以使圆盘谐振器工作在更高的谐振频率,同时也降低了微加工精度的要求.; Finite element method(FEM) in ANSYS is used to analyze the structure of disk micromechanical resonator.Especially,FEM combined with the lumped parameter model,are used to study effect of size and position of the disk micromechanical resonator on its vibration amplitude,frequency and quality factor Q.The results show that the size and position of the anchor of the disk micromechanical resonator can greatly affect its performance.Based on these studies,a new disk micromechanical resonator is proposed.It works in higher order vibration mode and takes nodal circle of the mode shape instead of the disk center as anchor.With this improvement,the disk micromechanical resonator can be even more easily fabricated since the anchor effect is greatly weakened,which leads to lower precision requirements on microfabrication.; 航空科学基金项目(2008ZH68002) |
| 语种 | zh_CN |
| 内容类型 | 期刊论文 |
| 源URL | [http://dspace.xmu.edu.cn/handle/2288/105713]  |
| 专题 | 航空航天－已发表论文 |
| 推荐引用方式 GB/T 7714 | 郭建来,刘畅,王建艳,等. 微机械圆盘谐振器的结构分析, Structural Analysis of Disk Micromechanical Resonator[J],2013. |
| APA | 郭建来,刘畅,王建艳,林杰,&郭航.(2013).微机械圆盘谐振器的结构分析.. |
| MLA | 郭建来,et al."微机械圆盘谐振器的结构分析".(2013). |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论