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	Characterization of thick film piezoelectric lead zirconate titanate (PZT) ceramics fabricated by tape casting processing
	Sun, Yingying ; Wang, Qing-Ming ; Qin, Lifeng ; Wang QM(王庆明)
	2013
关键词	Ceramic materials Electric properties Fabrication Microstructure Piezoelectricity Semiconducting lead compounds Sintering Thick film devices
英文摘要	Conference Name:2013 IEEE International Ultrasonics Symposium, IUS 2013. Conference Address: Prague, Czech republic. Time:July 21, 2013 - July 25, 2013.; Microstructures and electrical properties of PZT thick films fabricated by using a tape casting processing have been studied. The PZT thick film elements sintered at 1250-1300 °C. The PZT thick film obtained shows a uniform grain size and very dense microstructure with minimal pores and better than most of the screen-printed film reported before. A piezoelectric constant d31 of about -181pm/V was derived from the measurement of a unimorph actuator (23μm PZT/110μm stainless steel foil), which was very close the measurement results of thicker films. This proves that PZT films can be fabricated down to tens of micrometer with similar piezoelectric coefficients to bulk ceramics. The characterization results show tape-casting processing can be used to fabricate high quality PZT thick film resonators, and the extracted material constants can be used for sensor, actuator and transducer design. ? 2013 IEEE.
语种	英语
出处	http://dx.doi.org/10.1109/ULTSYM.2013.0281
出版者	IEEE Computer Society
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/85105]
专题	材料学院－会议论文
推荐引用方式 GB/T 7714	Sun, Yingying,Wang, Qing-Ming,Qin, Lifeng,et al. Characterization of thick film piezoelectric lead zirconate titanate (PZT) ceramics fabricated by tape casting processing. 2013-01-01.

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