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	Design and simulation of MEMS based radioisotope converter with electrostatic capacitive energy conversion mechanism
	San, Haisheng ; Cheng, Zaijun ; Deng, Zhiqiang ; Zhao, Zhiwen ; Li, Yanfei ; Chen, Xuyuan ; San HS(伞海生) ; Chen XY(陈旭远)
	2011
关键词	Capacitors Conversion efficiency Design Electrostatics Energy conversion MEMS Micromachining Radioisotopes Vibrations (mechanical)
英文摘要	Conference Name:6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011. Conference Address: Kaohsiung, Taiwan. Time:February 20, 2011 - February 23, 2011.; Institute of Electrical and Electronics Engineers (IEEE); IEEE Nanotechnology Council (NTC); National Cheng Kung University; National Tsing Hua University; Chinese International NEMS Socity (CINS); This paper presents the design and simulation of electrostatic capacitive vibration-to-electricity energy conversion system based on radioisotope Ni 63 that produces low energy beta particles. The electrostatic capacitive energy conversion utilizes a variable capacitor to convert radioisotope energy into electrical energy by mechanical vibration as transformed intermediate. The MEMS capacitor is designed as a radioisotope actuated parallel-plate spring-mass-damping structure fabricated through the mature silicon-based micromachining processes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a MEMS based energy converter is able to provide an average output power of 0.0812 μWcm-2 and energy conversion efficiency of about 4% according to the radioisotope activity of 10 mCicm-2. ? 2011 IEEE.
语种	英语
出处	http://dx.doi.org/10.1109/NEMS.2011.6017521
出版者	IEEE Computer Society
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86348]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	San, Haisheng,Cheng, Zaijun,Deng, Zhiqiang,et al. Design and simulation of MEMS based radioisotope converter with electrostatic capacitive energy conversion mechanism. 2011-01-01.

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