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	Research on parameters of bonnet polishing based on FEA
	Wang, Chunjin ; Yang, Wei ; Guo, Yinbiao ; Wang, Zhenzhong ; Zheng, Maojiang ; Yang W(杨炜) ; Guo YB(郭隐彪) ; Wang ZZ(王振忠)
	2012
关键词	Computer simulation Deformation Finite element method Rubber
英文摘要	Conference Name:2011 7th International Conference on MEMS, NANO and Smart Systems, ICMENS 2011. Conference Address: Kuala Lumpur, Malaysia. Time:November 4, 2011 - November 6, 2011.; Int. Assoc. Comput. Sci. Inf. Technol.; Singapore Institute of Electronics; In this paper, according to the bonnet polishing technology, in order to get the change regularity of the bonnet's deformation, the inflated deformation model of the bonnet, which is made all of rubber or made of rubber but with a nylon enhancement layer, is established and analyzed by using the FEA simulation. And then, by simulating the process of the bonnet polishing the plane wafer, it achieves the contact pressure curve which varies with the bonnet decrement. According to the Preston equation, k can be acquired through the experiment, v can be achieved through mathematical modeling, and p has been achieved in this paper. Thus, the removal function based on FEA will be acquired. 漏 (2012) Trans Tech Publications, Switzerland.
语种	英语
出处	http://dx.doi.org/10.4028/www.scientific.net/AMR.403-408.486
出版者	Trans Tech Publications
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86196]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Wang, Chunjin,Yang, Wei,Guo, Yinbiao,et al. Research on parameters of bonnet polishing based on FEA. 2012-01-01.

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