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The experimental research on uniformity of argon inductively coupled plasma at different cylinder heights
Wang, Song B ; Zhang, Xian Hui ; Wang, Hong Zhe ; Liu, Lin Ying ; Zhou, Ren Wu ; Yang, Si Ze ; Liu, Dong Ping ; Yang SZ(杨思泽) ; Liu DP(刘东平)
2013
关键词Carrier concentration Electron temperature Inductively coupled plasma Langmuir probes Negative ions Plasma sheaths
英文摘要Conference Name:2013 2nd International Conference on Energy and Environmental Protection, ICEEP 2013. Conference Address: Guilin, China. Time:April 19, 2013 - April 21, 2013.; We report on the characteristics of argon inductively coupled plasma (ICP) for the ITER neutral beam injection system. In argon ICP, it was found by using Langmuir probe that the radial distribution of electronic density (Ne) was uniform while the radial distributions of both electron temperature (kTe) and electric potential (VP) were non-uniform. The former depend on two factors: the variation of Ne was small, and the value of Ne was very large. The latter is owing to the generation and disappearance of the negative ions in the ICP, where the additional dynamic processes produce the instability. In addition, both kTe and Vp profiles were very similar at the cylinder height H=14 cm, which proves the plasma sheath theory to some extent. Finally, both kTe and Vp began flatter with the reduction of the cylinder height, which is owing to the decrease of the negative ions in the ICP. ? (2013) Trans Tech Publications, Switzerland.
语种英语
出处http://dx.doi.org/10.4028/www.scientific.net/AMR.724-725.686
出版者Trans Tech Publications Ltd
内容类型其他
源URL[http://dspace.xmu.edu.cn/handle/2288/86165]  
专题物理技术-会议论文
推荐引用方式
GB/T 7714
Wang, Song B,Zhang, Xian Hui,Wang, Hong Zhe,et al. The experimental research on uniformity of argon inductively coupled plasma at different cylinder heights. 2013-01-01.
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