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	Adaptive modeling of MEMS system-level simulation based on evolutionary computation
	Sun, DH ; Wang, CZ ; Li, WW ; Sun DH(孙道恒)
	2001
英文摘要	Conference Name:Conference on Micromachining and Microfabrication Process Technology and Devices. Conference Address: NANJING, PEOPLES R CHINA. Time:NOV 07-09, 2001.; System-level simulation, to which is paid much attention because of its multi-discipline, is a special requirement for MEMS analysis and design. In the article, an adaptive modeling methodology based on the evolutionary computation (ECM) is proposed, in accordance with the existed problems in present modeling. The lower order modals and the general independent functions are considered to construct the complete set. The dynamical equations of the reduced order model can be obtained. As an example, a static electrical actuator with micro cantilever is analyzed. The traditional modeling problems such as, how to find a good set of basis shapes, which elements should be selected in the base set, and how to construct the energy expression etc. can be solved by using ECM.
语种	英语
出处	http://dx.doi.org/10.1117/12.444710
出版者	P SOC PHOTO-OPT INS
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86078]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Sun, DH,Wang, CZ,Li, WW,et al. Adaptive modeling of MEMS system-level simulation based on evolutionary computation. 2001-01-01.

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