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	Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering - art no 67232P
	Wu, Yue-Bo ; Huang, Bo ; Zhang, Liang-Tang ; Li, Jing ; Wu, Sun-Tao ; Li J(李静)
	2007
关键词	THIN-FILMS ZINC-OXIDE TEMPERATURE SUBSTRATE GROWTH DC
英文摘要	Conference Name:3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies. Conference Address: Chengdu, PEOPLES R CHINA. Time:JUL 08-12, 2007.; The Al-doped ZnO (AZO) films were deposited on glass by RF magnetron sputtering under different sputtering power: 75W, 120W, 160W and 200W. During the films deposition, the other sputtering conditions were maintained constant. The crystal structures of the AZO films were characterized and analyzed by X-ray diffraction. The surface morphologies of the films were observed by SEM. The transmission spectra of the films were measured using a spectrophotometer within the range from 200 to 800 nm at room temperature. The results indicate each of the films has a preferential c-axis orientation and the grain size increases with the increase of sputtering power. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics.
语种	英语
出处	http://dx.doi.org/10.1117/12.783325
出版者	P SOC PHOTO-OPT INS
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86064]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Wu, Yue-Bo,Huang, Bo,Zhang, Liang-Tang,et al. Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering - art no 67232P. 2007-01-01.

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