Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications

CORC > 厦门大学 > 物理技术－已发表论文

	Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications
	San, Haisheng ; Zhang, Hong ; Zhang, Qiang ; Yu, Yuxi ; Chen, Xuyuan ; San HS(伞海生) ; Zhang H(张弘) ; Yu YX(余煜玺) ; Chen XY(陈旭远)
刊名	http://dx.doi.org/10.1088/0960-1317/23/7/075020
	2013
关键词	DESIGN OPTIMIZATION WAFER MEMS MICROSYSTEMS FABRICATION
英文摘要	National Natural Science Foundation of China [51075344, 61274120, 51175444]; Fujian Province Major Projects on University-Industry Cooperation in Science and Technology [2013H6023]; Science and Technology Program of Xiamen [3502Z20123008, 3502Z20126006]; Silicon-glass (Si-glass)-based single piezoresistive pressure sensors were designed and fabricated by standard MEMS technology. The single piezoresistive sensing element was designed to be on the lower surface of the silicon diaphragm and be vacuum-sealed in a Si-glass cavity, which form a self-packaging protection structure helpful to the applications of sensors in harsh media. The pressure sensors were fabricated using a Si-glass anodic bonding technique, and the embedded Al feedthrough lines at the Si-glass interface are used to realize the electrical connections between the piezo-sensing element and the electrode-pads, and two larger-size electrode-pads are fabricated for realizing the soldered electrical connection between the sensor and the external circuit. The performance of the pressure sensors was characterized by a pressure test system at different temperature conditions. The temperature compensation was performed by the difference between the output voltage at zero-pressure and the output at operation pressure. The measurement results show that the sensitivity is 24 mV V-1 MPa-1, the coefficient of sensitivity is 0.14% FS degrees C-1, and both the zero-point offset and the temperature coefficient of offset are equal to zero, which are able to meet the commercial application requirements. However, a nonlinearity of 5.2% FS caused by the balloon effect would considerably worsen the accuracy of the pressure sensor. It is suggested to reduce the balloon effect by using a bossed-diaphragm structure in the pressure sensor.
语种	英语
出版者	IOP PUBLISHING LTD
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/91883]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	San, Haisheng,Zhang, Hong,Zhang, Qiang,et al. Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications[J]. http://dx.doi.org/10.1088/0960-1317/23/7/075020,2013.
APA	San, Haisheng.,Zhang, Hong.,Zhang, Qiang.,Yu, Yuxi.,Chen, Xuyuan.,...&陈旭远.(2013).Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications.http://dx.doi.org/10.1088/0960-1317/23/7/075020.
MLA	San, Haisheng,et al."Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications".http://dx.doi.org/10.1088/0960-1317/23/7/075020 (2013).