Simulations and experiments on the fabrication of silicon tip

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	Simulations and experiments on the fabrication of silicon tip
	Wang, ML ; Sun, DH ; Wang, YH ; Maher, MA ; Jakubczak, JF ; Sun DH(孙道恒)
刊名	http://dx.doi.org/10.1117/12.524647
	2004
关键词	TRANSDUCERS
英文摘要	Simulations and experiments on three kinds of Si tip fabrication techniques had been done, which are Anisotropic Dry Etching (ADE), Anisotropic Wet Etching (AWE) and AWE combining with bonding. The simulation results showed that the parameters applied in the ADE and AWE should be controlled much more precisely than AWE combining with bonding to get expected tips. The experiments prove that the parameters of fabricating silicon tip by ADE and AWE have little tolerance. The conclusions on AWE combining with bonding drew from simulations are verified in the detail experiments. From the simulations and experiments, excellent reliability and controllability are witnessed in AWE combining with bonding and a tip with top diameter within 23.44nm had been achieved.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/68965]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Wang, ML,Sun, DH,Wang, YH,et al. Simulations and experiments on the fabrication of silicon tip[J]. http://dx.doi.org/10.1117/12.524647,2004.
APA	Wang, ML,Sun, DH,Wang, YH,Maher, MA,Jakubczak, JF,&孙道恒.(2004).Simulations and experiments on the fabrication of silicon tip.http://dx.doi.org/10.1117/12.524647.
MLA	Wang, ML,et al."Simulations and experiments on the fabrication of silicon tip".http://dx.doi.org/10.1117/12.524647 (2004).