QQ客服 官方微博 反馈留言

	Zr1–xSixN 纳米涂层的制备及其力学性能; PREPARATION AND MECHANICAL PROPERTIES OF Zr1–xSixN NANO-COATINGS
	黄若轩 ; 孙 鹏 ; 朱芳萍 ; 祁正兵 ; 王周成
	2010-10
关键词	氮化硅锆涂层 硬度 摩擦因数 磨损性能 zirconium silicon nitride coatings hardness friction factor abrasion property
英文摘要	第一作者：黄若轩(1984—)，男，硕士研究生。 通讯作者：王周成(1963—)，男，教授。; [中文文摘]采用直流与射频共溅射技术制备Zr1–xSixN 纳米涂层。通过改变Si 靶溅射功率控制涂层中Si 含量，研究了不同Si 含量对Zr1–xSixN 涂层的物 相结构、晶粒尺寸、硬度和摩擦磨损性能的影响，探索了Zr1–xSixN 纳米涂层的致硬机理。结果表明：Si 的掺入影响Zr1–xSixN 涂层的择优取向和相结 构，随着Zr1–xSixN 涂层中Si 含量的增加，涂层截面的形貌由柱状晶转变为非柱状等轴晶，其结构的变化为：固溶体→nc-ZrN/α-Si3N4 结构→非晶结构。 涂层的晶粒尺寸在12～30 nm 之间。对于Si 含量低于3.14% (摩尔分数)的Zr1–xSixN 涂层，由于固溶强化作用使硬度随Si 含量增加而增大，对于Si 含量高于3.14%的Zr1–xSixN 涂层，通过晶粒的转动和原子在晶界的移动能产生塑性形变，提高了涂层塑性形变能力，使得硬度下降。Zr1–xSixN 涂层的 耐磨损性能随Si 含量的增加而增强。 [英文文摘]Zr1–xSixN nano-coatings were deposited by direct current and radio frequency co-sputtering from zirconium and silicon. The Si contents in the Zr1–xSixN coating were varied by changing the power applied to the Si target. The influences of Si content on the phase structure, composition, crystal sizes, hardness and tribological properties of Zr1–xSixN coatings were investigated, and the hardening mechanism of the coatings was explored. The results show that the addition of Si significantly affects the orientation and phase structure of Zr1–xSixN coatings. When Si content increased, the cross-section morphology of the coating changes from column structure to non-column structure, the microstructure changes from solid solution to nc-ZrN/α-Si3N4, and then to amorphous. The grain size in the coating is from 12 to 30 nm. When Si adding content is lower than 3.14% in mole, its hardness of Zr1–xSixN coatings increases with the increase of Si content, which is taken as the result of solid solution hardening; while for Zr1–xSixN coatings with the Si contents higher than 3.14% in mole, as a result of atomic sliding in the grain boundaries and grain rotation, its hardness decreases with the increase of Si content. The coatings with higher Si contents have better wear resistance.; 国家科技支撑计划(2007BAE05B04)资助项目。
语种	中文
出版者	《硅酸盐学报》编辑部
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/3746]
专题	化学化工－已发表论文
推荐引用方式 GB/T 7714	黄若轩,孙 鹏,朱芳萍,等. Zr1–xSixN 纳米涂层的制备及其力学性能, PREPARATION AND MECHANICAL PROPERTIES OF Zr1–xSixN NANO-COATINGS[J],2010.
APA	黄若轩,孙 鹏,朱芳萍,祁正兵,&王周成.(2010).Zr1–xSixN 纳米涂层的制备及其力学性能..
MLA	黄若轩,et al."Zr1–xSixN 纳米涂层的制备及其力学性能".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。