Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings

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	Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings
	Zhang, K. ; Wang, L. S. ; Yue, G. H. ; Chen, Y. Z. ; Peng, D. L. ; Qi, Z. B. ; Wang, Z. C. ; Peng DL(彭栋梁)
刊名	http://dx.doi.org/10.1016/j.surfcoat.2010.12.035
	2011-03-15
关键词	SUPERHARD NANOCOMPOSITE COATINGS THERMAL-STABILITY TRIBOLOGICAL PROPERTIES FILMS MICROSTRUCTURE DEPOSITION
英文摘要	National Key Technology R&D Program of China [2007BAE05B04]; National Natural Science Foundation of China [50825101, 50971108]; TiAlSiN/Si3N4 multilayer coatings which have different separate layer thicknesses of TiAlSiN or Si3N4 were deposited onto glass sheets, single-crystal silicon wafers and polished WC-Co substrates by reactive magnetron co-sputtering. The morphology, crystalline structure and thickness of the as-prepared multilayer coatings were characterized by TEM, SEM, XRD and film thickness measuring instrument. The mechanical properties of the coatings were evaluated by a nanoindenter. The effects of monolayer thickness on the microstructure and properties of TiAlSiN/Si3N4 multilayer coatings were explored. The coatings showed the highest hardness when the thickness of Si3N4 and TiAlSiN monolayers was 0.33 nm and 5.8 nm, respectively. The oxidation characteristics of the coatings were studied at temperatures ranging from 700 degrees C to 900 degrees C for oxidation time up to 20 h in air. It was found that the coatings displayed good oxidation resistance. (C) 2010 Elsevier B.V. All rights reserved.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/59479]
专题	材料学院－已发表论文
推荐引用方式 GB/T 7714	Zhang, K.,Wang, L. S.,Yue, G. H.,et al. Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings[J]. http://dx.doi.org/10.1016/j.surfcoat.2010.12.035,2011.
APA	Zhang, K..,Wang, L. S..,Yue, G. H..,Chen, Y. Z..,Peng, D. L..,...&彭栋梁.(2011).Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings.http://dx.doi.org/10.1016/j.surfcoat.2010.12.035.
MLA	Zhang, K.,et al."Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings".http://dx.doi.org/10.1016/j.surfcoat.2010.12.035 (2011).