Influences of CO<sub>2</sub> laser annealing on mechanical and laser-induced damage properties of ZrO<sub>2</sub> thin films

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Influences of CO₂ laser annealing on mechanical and laser-induced damage properties of ZrO₂ thin films
	Wei Chaoyang ; Deng DG(邓德刚) ; Tian Guanglei ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	optik
	2008
卷号	119 期号:13 页码:624
关键词	CO2 laser annealing Weak absorption Laser-induced damage threshold Residual stress
ISSN号	0030-4026
中文摘要	zirconium dioxide (zro2) thin films were deposited on bk7 glass substrates by the electron beam evaporation method. a continuous wave co2 laser was used to anneal the zro2 thin films to investigate whether beneficial changes could be produced. after annealing at different laser scanning speeds by co2 laser, weak absorption of the coatings was measured by the surface thermal lensing (stl) technique, and then laser-induced damage threshold (lidt) was also determined. it was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. the lidt of the zro2 coatings decreased greatly when the laser scanning speeds were below some value. a nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. the influences of post-deposition co2 laser annealing on the structural and mechanical properties of the films have also been investigated by x-ray diffraction and zygo interferometer. it was found that the microstructure of the zro2 films did not change. the residual stress in zro2 films showed a tendency from tensile to compressive after co, laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. the residual stress may be mitigated to some extent at proper treatment parameters. (c) 2007 elsevier gmbh. all rights reserved.
学科主题	光学薄膜
收录类别	EI
资助信息	national high-tech research and development program of china
语种	英语
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4724]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Wei Chaoyang,Deng DG,Tian Guanglei,et al. Influences of CO₂ laser annealing on mechanical and laser-induced damage properties of ZrO₂ thin films[J]. optik,2008,119(13):624, 629.
APA	Wei Chaoyang,邓德刚,Tian Guanglei,贺洪波,邵建达,&范正修.(2008).Influences of CO₂ laser annealing on mechanical and laser-induced damage properties of ZrO₂ thin films.optik,119(13),624.
MLA	Wei Chaoyang,et al."Influences of CO₂ laser annealing on mechanical and laser-induced damage properties of ZrO₂ thin films".optik 119.13(2008):624.