三种不同后处理方式对ZrO_2薄膜性能的影响

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	三种不同后处理方式对ZrO_2薄膜性能的影响; Influence of three post-treatment methods on properties of ZrO2 thin films
	王聪娟 ; 晋云霞 ; 邵建达 ; 范正修
刊名	中国激光
	2008
卷号	35 期号:10 页码:1600
关键词	薄膜 Damage thresholds 氧化锆 Electron beam evaporations 抗激光损伤阈值 Pretreatment 退火 Single layers 激光预处理 Treatment methods 离子后处理
ISSN号	0258-7025
其他题名	Influence of three post-treatment methods on properties of ZrO2 thin films
中文摘要	采用有氧热处理、激光预处理和离子后处理三种方式对电子束蒸发(EBE)制备的单层ZrO_2薄膜进行了后处理,并分别对样品的光学性能和抗激光损伤阈值(LIDT)特性进行了研究。实验结果表明,热处理方式可以有效排除膜层内吸附的水气,弥补薄膜制备过程中的氧损失,使得光谱短移、吸收减小、损伤阈值增高;激光预处理过程可以在一定程度上减少缺陷、提高损伤阈值,但对膜层的光谱和吸收情况没有明显的改善作用;而离子后处理能够提高膜层的堆积密度、减少缺陷、降低吸收从而提高损伤阈值。由于三种方式处理机制不同,在实际应用中应根据膜层的性能选择合适的处理方式。; Heat treatment with oxygen, laser conditioning and ion post-treatment were post processed respectively on ZrO2 single layers deposited by electron beam evaporation (EBE). Optical properties and laser-induce damage threshold (LIDT) of the films were studied. It is found that heat treatment can get rid of the hydrosphere adsorbed in the coating, offset the lost of oxygen in the deposition, which leads to a short shift of spectra curve, a decrease of absorption and an increase of LIDT. Laser pretreatment could wipe off the defects at a certain extent and increase the LIDT, but has no use in spectrum and absorption. And ion post-treatment could increase the stack density, lessen the defects, reduce the absorption and improve the LIDT. Each method has its own treat mechanism, and the most suitable method should be chosen according to the characteristics of the coatings.
学科主题	光学薄膜
收录类别	EI
语种	中文
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4720]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	王聪娟,晋云霞,邵建达,等. 三种不同后处理方式对ZrO_2薄膜性能的影响, Influence of three post-treatment methods on properties of ZrO2 thin films[J]. 中国激光,2008,35(10):1600, 1604.
APA	王聪娟,晋云霞,邵建达,&范正修.(2008).三种不同后处理方式对ZrO_2薄膜性能的影响.中国激光,35(10),1600.
MLA	王聪娟,et al."三种不同后处理方式对ZrO_2薄膜性能的影响".中国激光 35.10(2008):1600.