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	Modeling, identification and compensation for geometric errors of laser annealing table
	Li DX(李殿新) ; Zhang JF(张建富) ; Zhang YL(张云亮) ; Feng PF(冯平法) ; LI Dian-xin ; ZHANG Jian-fu ; ZHANG Yun-liang ; FENG Ping-fa
	2016-03-30 ; 2016-03-30
关键词	geometric error error modeling error measurement error identification error compensation laser annealing table TG156.99
其他题名	Modeling, identification and compensation for geometric errors of laser annealing table
中文摘要	In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.; In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.
语种	英语 ; 英语
内容类型	期刊论文
源URL	[http://ir.lib.tsinghua.edu.cn/ir/item.do?handle=123456789/143783]
专题	清华大学
推荐引用方式 GB/T 7714	Li DX,Zhang JF,Zhang YL,et al. Modeling, identification and compensation for geometric errors of laser annealing table[J],2016, 2016.
APA	李殿新.,张建富.,张云亮.,冯平法.,LI Dian-xin.,...&FENG Ping-fa.(2016).Modeling, identification and compensation for geometric errors of laser annealing table..
MLA	李殿新,et al."Modeling, identification and compensation for geometric errors of laser annealing table".(2016).

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