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	Recent progress of atmospheric-pressure glow discharges with bare-metallic electrodes
	Li Heping ; Li Guo ; Wang Sen ; Bao Chengyu
	2010-10-12 ; 2010-10-12
关键词	Experimental/ electrodes glow discharges plasma radiofrequency heating plasma sources/ pressure glow discharges bare-metallic electrodes radio frequency atmospheric pressure plasma sources plasma generators/ A5280H Glow and corona discharges A5250G Plasma heating A5250D Plasma sources
中文摘要	Radio frequency atmospheric pressure glow discharge (RF APGD) plasma sources have wide applications in different fields, such as plasma-aided etching, deposition, disinfection and sterilization, air purification, decontamination of chemical and/or biological warfare agents. At the present time, it is a challenging task to obtain nitrogen, oxygen or air RF APGDs using the plasma generators with bare metallic electrodes at atmospheric pressure. This paper, reviews the production methods of the RF APGD plasma sources with pure nitrogen, oxygen or air as the plasma-working gas by using an induced gas discharge approach or under an intensified local electric field, and the influences of the plasma-working gas flow rates on the discharge characteristics of the glow discharges at atmosphere, including the recent progress of the experimental studies on the electrical features of the RF APGD plasma sources using bare-metallic electrodes.
语种	中文
出版者	Editorial Department of Science & Technology Review ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/82823]
专题	清华大学
推荐引用方式 GB/T 7714	Li Heping,Li Guo,Wang Sen,et al. Recent progress of atmospheric-pressure glow discharges with bare-metallic electrodes[J],2010, 2010.
APA	Li Heping,Li Guo,Wang Sen,&Bao Chengyu.(2010).Recent progress of atmospheric-pressure glow discharges with bare-metallic electrodes..
MLA	Li Heping,et al."Recent progress of atmospheric-pressure glow discharges with bare-metallic electrodes".(2010).

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