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	Squeeze film damping effect of the micro airflow in a MEMS sealed chamber
	Li Li-wei ; Zhu Rong ; Zhou Zhao-ying ; Ren Jian-xing
	2010-10-12 ; 2010-10-12
关键词	Practical/ damping lead compounds microactuators microfluidics piezoelectric actuators Rayleigh-Ritz methods zirconium compounds/ squeeze film damping effect micro airflow MEMS sealed chamber air gap PZT actuator gas damping effect Rayleigh-Ritz energy method air pressure distribution isothermal compressible Reynold equation coupled model PZT/ B2575 MEMS and NEMS device technology B2860A Piezoelectric devices/ PbZrO3TiO3/int TiO3/int ZrO3/int O3/int Pb/int Ti/int Zr/int O/int PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss
中文摘要	The squeeze film damping effect between the air gap and the PZT actuator in a sealed chamber is analyzed. Both the gas damping effect and the Rayleigh-Ritz energy method are utilized to investigate the coupled effect between the micro airflow and its actuator. The air pressure distribution of the micro airflow is determined by solving the nondimensionalized and linearized isothermal compressible Reynolds' equation and combined with the sealed pressure boundary condition. The coupled model of piezoelectric-silicon film- micro airflow is derived according to the Rayleigh-Ritz energy method. By comparing the undetermined coefficient lambda of the displacement function without micro airflow and the undetermined coefficient lambda with micro airflow, the air damping factor is extracted. The influencing of micro airflow squeeze film damping on PZT actuator can be exhibited by such air damping factor. All the investigation provide theoretical foundation and control strategy for microfluid actuating.
语种	中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80436]
专题	清华大学
推荐引用方式 GB/T 7714	Li Li-wei,Zhu Rong,Zhou Zhao-ying,et al. Squeeze film damping effect of the micro airflow in a MEMS sealed chamber[J],2010, 2010.
APA	Li Li-wei,Zhu Rong,Zhou Zhao-ying,&Ren Jian-xing.(2010).Squeeze film damping effect of the micro airflow in a MEMS sealed chamber..
MLA	Li Li-wei,et al."Squeeze film damping effect of the micro airflow in a MEMS sealed chamber".(2010).

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