Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering
	Sun Xilian ; Hong RJ(洪瑞金) ; Hou Haihong ; Fan ZX(范正修) ; Shao JD(邵建达)
刊名	thin solid films
	2007
卷号	515 期号:17 页码:6962
关键词	silver sputtering thickness optical properties nanostructures
ISSN号	0040-6090
中文摘要	a series of silver films with different thickness were prepared under identical conditions by direct current magnetron sputtering. the optical properties of the silver films were measured using spectrophotometric techniques and the optical constants were calculated from reflection and transmission measurements made at near normal incidence. the results show that the optical properties and constants are affected by films' thickness. below the critical thickness of 17 nm at which ag film forms a continuous film, the optical properties and constants vary significantly as the thickness of films increases and then tends to a stable value which is reached at 41 nm. x-ray diffraction measurements were carried out to examine the structure and stress evolution of the ag films as a function of films' thickness. it was found that the interplanar distance of (111) orientation decreases when the film thickness increases and tends to be close to that of bulk material. the compressive strains also decrease with increasing thickness. (c) 2007 published by elsevier b.v.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000246947800049
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4554]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Sun Xilian,Hong RJ,Hou Haihong,et al. Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering[J]. thin solid films,2007,515(17):6962, 6966.
APA	Sun Xilian,洪瑞金,Hou Haihong,范正修,&邵建达.(2007).Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering.thin solid films,515(17),6962.
MLA	Sun Xilian,et al."Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering".thin solid films 515.17(2007):6962.