| Microfabrication of Pb-free piezoceramic microrod arrays and 1-3 type ceramic/polymer piezocomposite films | |
| Xu, Ying ; Li, Jing-Feng | |
| 2010-10-12 ; 2010-10-12 | |
| 关键词 | Piezoelectric materials Electroceramics Composite materials Pb-free piezoelectric ceramics Microfabrication 1-3 type piezoelectric composites ULTRASONIC TRANSDUCER APPLICATIONS LEAD-FREE COMPOSITES FABRICATION Materials Science, Multidisciplinary Physics, Applied |
| 中文摘要 | A microfabrication method based on MEMS technology was developed to fabricate microscale multifunctional composites with 1-3 type patterned structure by combining silicon micromolding with sol-gel processing. By this method, a microscale rod array of lead-free Na0.5K0.5NbO3 piezoelectric ceramics was fabricated, which has a feature size of 20 mu m lateral width and 30 mu m height. Piezoceramic/ epoxy composite thick films containing such an array as piezoelectric-active fillers were fabricated by vacuum infiltration, in which the piezoelectricity of the embedded Na0.5K0.5NbO3 rods was confirmed by a scanning probe system. (C) 2009 Elsevier B.V. All rights reserved. |
| 语种 | 英语 ; 英语 |
| 出版者 | ELSEVIER SCIENCE BV ; AMSTERDAM ; PO BOX 211, 1000 AE AMSTERDAM, NETHERLANDS |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/78463]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Xu, Ying,Li, Jing-Feng. Microfabrication of Pb-free piezoceramic microrod arrays and 1-3 type ceramic/polymer piezocomposite films[J],2010, 2010. |
| APA | Xu, Ying,&Li, Jing-Feng.(2010).Microfabrication of Pb-free piezoceramic microrod arrays and 1-3 type ceramic/polymer piezocomposite films.. |
| MLA | Xu, Ying,et al."Microfabrication of Pb-free piezoceramic microrod arrays and 1-3 type ceramic/polymer piezocomposite films".(2010). |
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