Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition
	Shen Yanming ; Shao SY(邵淑英) ; Yu Hua ; Fan ZX(范正修) ; He HB(贺洪波) ; Shao JD(邵建达)
刊名	appl. surf. sci.
	2007
卷号	254 期号:2 页码:552
关键词	ZrO2 thin films electron beam evaporation residual stress oxygen partial pressure
ISSN号	0169-4332
中文摘要	zro2 thin films were prepared by electron beam evaporation at different oxygen partial pressures. the influences of oxygen partial pressure on structure and related properties of zro2 thin films were studied. transmittance, thermal absorption, structure and residual stress of zro2 thin films were measured by spectrophotometer, surface thermal lensing technique (stl), x-ray diffraction and optical interferometer, respectively. the results showed that the structure and related properties varied progressively with the increase of oxygen partial pressure. the refractive indices and the packing densities of the thin films decreased when the oxygen partial pressure increased. the tetragonal phase fraction in the thin films decreased gradually as oxygen partial pressure increased. the residual stress of film deposited at base pressure was high compressive stress, the value decreased with the increase of oxygen partial pressure, and the residual stress became tensile with the further increase of oxygen pressure, which was corresponding to the evolution of packing densities and variation of interplanar distances. (c) 2007 elsevier b.v. all rights reserved.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000251201600022
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4550]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Shen Yanming,Shao SY,Yu Hua,et al. Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition[J]. appl. surf. sci.,2007,254(2):552, 556.
APA	Shen Yanming,邵淑英,Yu Hua,范正修,贺洪波,&邵建达.(2007).Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition.appl. surf. sci.,254(2),552.
MLA	Shen Yanming,et al."Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition".appl. surf. sci. 254.2(2007):552.